Aurelian Dodoc und Alexander - Info zur Person

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Kenji Yamazoe | Canon Inc. | Citations | Related Authors

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David Shafer 1, Alexander Epple 1, Aurelian Dodoc 1, Wilhelm Ulrich 1, Karl-Heinz Schuster 1 - Show less +1 more • Institutions (1). › authors

Catadioptric projection lenses for immersion lithography | (2005) |...

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Author(s): Heiko Feldmann; Aurelian Dodoc; Alexander Epple; Hans-Jürgen Rostalski; David Shafer; Wilhelm Ulrich

DE D1 - Katadioptrisches projektionsobjektiv ...

patents.google.com

Other languages: English; Inventor: David Shafer: Wilhelm Ulrich: Aurelian Dodoc: Buenau Rudolf Von: Hans-Juergen Mann: Alexander Epple: Susanne Beder Inventor: David Shafer: Wilhelm Ulrich: Aurelian Dodoc: Rudolf Von Buenau: Hans-Juergen Mann: Alexander Epple; Current Assignee (The listed assignees ... › patent

US B2 - Catadioptric projection objective - Google

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Inventor: David Shafer: Wilhelm Ulrich: Aurelian Dodoc: Rudolf M. Von Buenau: Hans-Juergen Mann: Alexander Epple; Current Assignee. › patents

WO A2 - Projection optical system - Google Patents

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Download PDF Find Prior Art Similar. Other languages: French; Inventor: Hans-Jürgen Rostalski: Aurelian Dodoc: Wilhelm Ulrich: Alexander Epple ... › patents

David Shafer - Veripages

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Aurelian Dodoc - Heidenheim, DE Rudolf Von Buenau - Jena, DE Hans-Juergen Mann - Oberkochen, DE Alexander Epple - Aalen, DE. Assignee:. › Shafer

Omura V. Shafer et al, | Casetext

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... WILHELM ULRICH, AURELIAN DODOC, RUDOLF VON BUENAU, HANS-JURGEN MANN, ALEXANDER EPPLE, SUSANNE BEDER, and WOLFGANG SINGER Junior Party (Application ... › admin-law

国际主流光刻机研发的最新进展

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20 Heiko Feldmann, Aurelian Dodoc, Alexander Epple et al.. Catadioptric projection lenses for immersion lithography[C]. SPIE, 2005, 5962:59620Y. › ArticlePdf

EP A1 - Système optique de projection Google Patents

patents.google.com

Other languages: German: English; Inventor: Hans-Jürgen Rostalski: Aurelian Dodoc: Alexander Epple: Wilhelm ... Application filed by Carl Zeiss SMT GmbH.

WO A3 - Illumination system for a microlithgraphic exposure...

patents.google.com

Application filed by Zeiss Carl Smt Ag, Alexander Sohmer, Aurelian Dodoc, Heiko Feldmann, Wilhelm Ulrich, Gerhard Fuerter, Rafael Egger, Artur Moegele, ...

国际主流光刻机研发的最新进展 - 中国光学期刊网

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von 袁琼雁 · · Zitiert von: 26 — [20] Heiko Feldmann, Aurelian Dodoc, Alexander Epple et al.. Catadioptric projection lenses for immersion lithography[C]. SPIE, 2005, 5962:59620Y. › Ful...

旋转波片法偏振检测装置器件参数校准-【维普期刊官网】

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SPIE, 2006, 6154( ); 7Heiko Feldmann, Aurelian Dodoc, Alexander Epple et al.. Catadioptric projection lenses for immersion lithography[C]. Proc. › Detail

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Aurelian Dodoc und Alexander Person-Info