Aurelian Dodoc und Wilhelm Ulrich - Info zur Person

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Kenji Yamazoe | Canon Inc. | Citations | Related Authors

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David Shafer 1, Alexander Epple 1, Aurelian Dodoc 1, Wilhelm Ulrich 1, Karl-Heinz Schuster 1 - Show less +1 more • Institutions (1). › authors

US Patent Application for Reduction projection objective and...

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Assignee: Carl Zeiss SMT AG (Oberkochen) Inventors: Wilhelm Ulrich (Aalen), Aurelian Dodoc (Heidenheim an der Brenz) Application Serial: ...

Catadioptric projection lenses for immersion lithography | (2005) |...

spie.org

Author(s): Heiko Feldmann; Aurelian Dodoc; Alexander Epple; Hans-Jürgen Rostalski; David Shafer; Wilhelm Ulrich

DE D1 - Katadioptrisches projektionsobjektiv ...

patents.google.com

Other languages: English; Inventor: David Shafer: Wilhelm Ulrich: Aurelian Dodoc: Buenau Rudolf Von: Hans-Juergen Mann: Alexander Epple: Susanne Beder Inventor: David Shafer: Wilhelm Ulrich: Aurelian Dodoc: Rudolf Von Buenau: Hans-Juergen Mann: Alexander Epple; Current Assignee (The listed assignees ... › patent

US B2 - Catadioptric projection objective - Google

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Inventor: David Shafer: Wilhelm Ulrich: Aurelian Dodoc: Rudolf M. Von Buenau: Hans-Juergen Mann: Alexander Epple; Current Assignee. › patents

WO A2 - Projection optical system - Google Patents

www.google.com

Download PDF Find Prior Art Similar. Other languages: French; Inventor: Hans-Jürgen Rostalski: Aurelian Dodoc: Wilhelm Ulrich: Alexander Epple ... › patents

Omura V. Shafer et al, | Casetext

casetext.com

... WILHELM ULRICH, AURELIAN DODOC, RUDOLF VON BUENAU, HANS-JURGEN MANN, ALEXANDER EPPLE, SUSANNE BEDER, and WOLFGANG SINGER Junior Party (Application ... › admin-law

imaging optics and projection exposure installation for ...

www.mysciencework.com

Hans-Jürgen MANN Johannes ZELLNER Aurelian DODOC Claus ZAHLTEN Christoph MENKE Marco PRETORIUS Wilhelm ULRICH Hans-Jürgen ROSTALSKI. Back to top ... › ...

WO A1 - Projection exposure apparatus for semiconductor...

patents.google.com

... Johannes Zellner, Michael Schottner, Daniel Kraehmer, Michael Totzeck, Aurelian Dodoc, Jochen Hetzler, Helmut Beierl, Wilhelm Ulrich.

WO A3 - Illumination system for a microlithgraphic exposure...

patents.google.com

Application filed by Zeiss Carl Smt Ag, Alexander Sohmer, Aurelian Dodoc, Heiko Feldmann, Wilhelm Ulrich, Gerhard Fuerter, Rafael Egger, Artur Moegele, ...

US A1 - Microlithographic projection exposure apparatus...

patents.google.com

US Application. Download PDF Find Prior Art Similar. Inventor: Aurelian Dodoc: Karl-Heinz Schuster: Joerg Mallmann: Wilhelm Ulrich: Hans-Juergen Rostalski ...

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Name "Dodoc" (2)

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