Göran Fleischer

	Ammern Bürgel Dresden

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Certain topics in ellipsometric data modeling with splines: a...

www.degruyter.com

In particular, the assistance provided by Steffen Brunner, Sven Bürgel, Göran Fleischer, Thomas Kache, Ulf Peter Müller, and Pavel Prunici is appreciated. Author contributions: The author has accepted responsibility for the entire content of this submitted manuscript and approved submission.

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Integrated ODP metrology with floating n&k's for lithography...

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Göran Fleischer. 3). 1). Tokyo Electron Europe Limited, German BranchDresden, Germany. 2). Timbre Technologies, Inc.,

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SPIE Profile of Göran Fleischer, Qimonda Dresden GmbH & Co OHG. SPIE Profiles is a networking platform for optics and photonics professionals.

Effect and procedures of post exposure bake temperature optimization...

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Author(s): Kirsten Ruck; Heiko Weichert; Steffen Hornig; Frank Finger; Göran Fleischer; Dave Hetzer

Application of integrated scatterometry measurements for a...

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Author(s): Uwe Kramer; Goeran Fleischer; Thomas Marschner; Steffen Hornig; Heiko Weichert; Dave Hetzer

Physical matching of CD-SEM: noise analysis and verification in FAB...

spie.org

Author(s): Uwe Kramer; Alessandra Navarra; Goeran Fleischer; Jan Kaiser; Frank Voss; Galit Zuckerman; Roman Kris; Igal Ben-Dayan; Elad Sommer; Amir Len; Shalev Dror; Dirk

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News

Bücher

Certain topics in ellipsometric data modeling with splines: a...

Dokumente zum Namen

Integrated ODP metrology with floating n&k's for lithography...

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