Maria Laura Gödecke und Karsten Frenner - Info zur Person

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白光-缪斯矩阵-傅里叶散射测量技术澎湃新闻

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— Maria Laura Gödecke, Karsten Frenner, Wolfgang Osten. Model-based characterisation of complex periodic nanostructures by white-light Mueller — Maria Laura Gödecke, Karsten Frenner, Wolfgang Osten. Model-based characterisation of complex periodic nanostructures by white-light Mueller ...

TECHNICAL PROGRAMME淡江大學機構典藏

tkuir.lib.tku.edu.tw

— ... coherent scanning Fourier scatterometry, Maria Laura Gödecke,. Sandy Peterhänsel, Karsten Frenner, Wolfgang Osten, Univ. Stuttgart. (Germany) — ... coherent scanning Fourier scatterometry, Maria Laura Gödecke,. Sandy Peterhänsel, Karsten Frenner, Wolfgang Osten, Univ. Stuttgart. (Germany) ...

Optical sensor design for fast and process-robust position ...ScienceDirect.com

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von ML Gödecke · · Zitiert von: 2 — Maria Laura Gödecke received the MS degree in physics from the Karlsruhe Institute of Technology in · Claudia Monika Bett · Dominic Buchta · Karsten Frenner ... von ML Gödecke · · Zitiert von: 2 — Maria Laura Gödecke received the MS degree in physics from the Karlsruhe Institute of Technology in · Claudia Monika Bett · Dominic Buchta · Karsten Frenner ...

Fifth International Conference on Optical and Photonics ...

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◽ ◽. Author(s):. Sandy Peterhänsel ◽. Dominic Buchta ◽. Karsten Frenner ◽. Wolfgang Osten ◽. Maria Laura Gödecke. Keyword(s):. › source

喜报 | Light: Advanced Manufacturing入选“中国科技期刊卓越行动计划高起点新刊”项目！

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Maria Laura Gödecke, Karsten Frenner, Wolfgang Osten. Model-based characterisation of complex periodic nanostructures by white-light Mueller-matrix Fourier ... › weixin

2016 TECHNICAL SUMMARIES - PDF Free DownloadDocPlayer.net

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... Maria Laura Gödecke, Sandy Peterhänsel, Karsten Frenner, Wolfgang Osten, Univ. Stuttgart (Germany) 64 SPIE Advanced Lithography Return to Contents Maria Laura Gödecke, Sandy Peterhänsel, Karsten Frenner, Wolfgang Osten, Univ. Stuttgart (Germany) 64 SPIE Advanced Lithography Return to Contents

2021 Vol. 2, No. 3Light: Advanced Manufacturing

www.light-am.com

Maria Laura Gödecke, Karsten Frenner, Wolfgang Osten. Published , 2(3) : doi: lam Optical scatterometry is one of the most ... Maria Laura Gödecke, Karsten Frenner, Wolfgang Osten. Published , 2(3) : doi: lam Optical scatterometry is one of the most ...

Detection of overlay error in double patterning gratings ...National Institutes of Health (NIH) (.gov)

pubmed.ncbi.nlm.nih.gov

von S Peterhänsel · · Zitiert von: 14 — Maria Laura Gödecke, Valeriano Ferreras Paz, Karsten Frenner, Wolfgang Osten. PMID: ; DOI: OE Abstract. With the help of simulations ... von S Peterhänsel · · Zitiert von: 14 — Maria Laura Gödecke, Valeriano Ferreras Paz, Karsten Frenner, Wolfgang Osten. PMID: ; DOI: OE Abstract. With the help of simulations ...

Model-based characterisation of complex periodic ...Light: Advanced Manufacturing

www.light-am.com

von ML Gödecke · · Zitiert von: 12 — Model-based characterisation of complex periodic nanostructures by white-light Mueller-matrix Fourier scatterometry · Maria Laura Gödecke *, · Karsten Frenner ... von ML Gödecke · · Zitiert von: 12 — Model-based characterisation of complex periodic nanostructures by white-light Mueller-matrix Fourier scatterometry · Maria Laura Gödecke *, · Karsten Frenner ...

Phase-structured illumination as a tool to detect nanometer ...SPIE Digital Library

www.spiedigitallibrary.org

von S Peterhänsel · · Zitiert von: 5 — ... Maria Laura Gödecke, Karsten Frenner, and Wolfgang Osten "Phase-structured illumination as a tool to detect nanometer asymmetries," Journal ... von S Peterhänsel · · Zitiert von: 5 — ... Maria Laura Gödecke, Karsten Frenner, and Wolfgang Osten "Phase-structured illumination as a tool to detect nanometer asymmetries," Journal ...

Front Matter: Volume 9778SPIEDigitalLibrary.org

www.spiedigitallibrary.org

— ... Maria Laura Gödecke, Sandy Peterhänsel, Karsten Frenner, and Wolfgang Osten, “Measurement of asymmetric side wall angles by coherent — ... Maria Laura Gödecke, Sandy Peterhänsel, Karsten Frenner, and Wolfgang Osten, “Measurement of asymmetric side wall angles by coherent ...

Optical sensor design for fast and process-robust position ...X-MOL

www.x-mol.com

— Maria Laura Gödecke , Claudia Monika Bett , Dominic Buchta , Karsten Frenner , Wolfgang Osten. Abstract We propose an optical sensor design — Maria Laura Gödecke , Claudia Monika Bett , Dominic Buchta , Karsten Frenner , Wolfgang Osten. Abstract We propose an optical sensor design ...

There is still time to register for a Short Course! Visit ...

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... Muhammad Rodlin Billah, Tobias Hoose, Temitiope Onanuga, Nicole Lindenmann, Philipp Dietrich, Tobias Wingert, Maria Laura Goedecke, Andreas Hofmann, Different approaches for resolution enhancement in optical nano metrology (Invited Paper), Wolfgang Osten, Karsten Frenner, Maria Laura Gödecke, Univ. › There-is-still-time-to-re... › optics-photonics

2016 OPTICS + PHOTONICS - PDF Free Download

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... Different approaches for resolution enhancement in optical nano metrology (Invited Paper), Wolfgang Osten, Karsten Frenner, Maria Laura Gödecke, Univ.

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Maria Laura Gödecke und Karsten Frenner Person-Info