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Full text of "Benchmark of Rigorous Methods for Electromagnetic Field...

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Benchmark of Rigorous Methods for Electromagnetic Field Simulations Sven Burger ab , Lin Zschiedrich ab , Frank Schmidt ab , Peter Evanschitzky c , Andreas ...

Growth of Ultrathin Films of Amorphous Ruthenium−Phosphorus ...pubs.acs.org › doi › abs

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· ... Christophe Detavernier, Vicky Philipsen, Vu Luong, Karl Opsomer, Andreas Erdmann, Peter Evanschitzky, Frank Scholze, Christian Laubis, ...

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@inproceedings{BurgerZschiedrichSchmidtetal.2008, author = {Sven Burger and Lin Zschiedrich and Frank Schmidt and Peter Evanschitzky and Andreas ...

Journal of Micro/Nanolithography MEMS and MOEMS - ScienceGatewww.sciencegate.app › sources

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Peter Evanschitzky ◽. Vicky Philipsen ◽. Frank Timmermans ◽ ... Keyword(s):. Euv Lithography · Download Full-text ...

9 Benchmark of Rigorous Methods for Electromagnetic Field Simulations...

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By Sven Burger Ab, Lin Zschiedrich Ab, Frank Schmidt Ab, Peter Evanschitzky C and Andreas Erdmann C. Abstract. a. Topics: 3D rigorous EMF simulations, ...

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Burger, Dr. Sven | Zuse Institute Berlin (ZIB)

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Sven Burger, Lin Zschiedrich, Frank Schmidt, Peter Evanschitzky, Andreas Erdmann, Benchmark of rigorous methods for electromagnetic field simulation ...

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Metadaten. Author: Sven BurgerORCiD, Lin Zschiedrich, Frank Schmidt, Peter Evanschitzky, Andreas Erdmann. Editor: H. Kawahira, L. S. Zurbrick.

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Peter Evanschitzky und Frank Person-Info

Full text of "Benchmark of Rigorous Methods for Electromagnetic Field...

Growth of Ultrathin Films of Amorphous Ruthenium−Phosphorus ...pubs.acs.org › doi › abs

@inproceedings{BurgerZschiedrichSchmidtetal.2008, author ...opus4.kobv.de › download › output › bibtex › docId

Journal of Micro/Nanolithography MEMS and MOEMS - ScienceGatewww.sciencegate.app › sources

9 Benchmark of Rigorous Methods for Electromagnetic Field Simulations...

Alle Infos zum Namen "Peter Evanschitzky"

Burger, Dr. Sven | Zuse Institute Berlin (ZIB)

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高NA EUV光刻吸收材料的观点和权衡,Journal of Micro X-MOLwww.x-mol.com › paper