Dominik Marcel Vaudrevange - Veröffentlichungen allgemein

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Sn DPP source-collector modules : status of alpha resources, beta...

core.ac.uk

By Marc Corthout, Rolf Apetz, Willi Neff, Hans Scheuermann, Guido Schriever, Max Scheuermann, Guido Seimons, Rob Snijkers, Dominik Vaudrevange, Erik ...

Integrating Philips' …e UV source in the alpha-tools - CORE

core.ac.uk

By Joseph Pankert, Rolf Apetz, Willi Neff, Sven Probst, Ralph Prummer, Oliver Rosier, Stefan Seiwert, Guido Siemons, Dominik Vaudrevange, Dirk Wagemann, ...

EUV sources for the alpha-tools | (2006) | Pankert | Publications |...

spie.org

Dominik Vaudrevange, Philips …e UV GmbH (Germany) Dirk Wagemann, Philips …e UV GmbH (Germany) Achim Weber, Philips ...

Power scaling of an …e ultraviolet light source for future...

core.ac.uk

... future lithography. By Erik Wagenaars, Felix Kuepper, Juergen Klein, Willi Neff, Marcel Damen, Pieter van der Wel, Dominik Vaudrevange and Jeroen Jonkers ...